@misc{indiciae0358e6e44087,
  title = {Hydrogenated Amorphous Silicon Carbide: A Low-loss Deposited Dielectric for Microwave to Submillimeter Wave Superconducting Circuits},
  author = {B. T. Buijtendorp and S. Vollebregt and K. Karatsu and D. J. Thoen and V. Murugesan and K. Kouwenhoven and S. Hähnle and J. J. A. Baselmans and A. Endo},
  year = {2021},
  doi = {10.1103/physrevapplied.18.064003},
  url = {https://arxiv.org/abs/2110.03500},
  note = {Source identifier: 2110.03500}
}