@misc{indiciae3b584240ece0,
  title = {Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon},
  author = {S. Kalem and R. Mostefaoui and J. Bourneix and J. Chevallier},
  year = {2021},
  doi = {10.1080/13642818608240664},
  url = {https://arxiv.org/abs/2110.03770},
  note = {Source identifier: 2110.03770}
}