TY  - RPRT
TI  - Infrared spectroscopy of hydrogenated and chlorinated amorphous silicon
AU  - S. Kalem
AU  - R. Mostefaoui
AU  - J. Bourneix
AU  - J. Chevallier
PY  - 2021
DO  - 10.1080/13642818608240664
UR  - https://arxiv.org/abs/2110.03770
ID  - 2110.03770
ER  -