@misc{indiciae3f5990254c6f,
  title = {\$\textbackslash{}textit\{Ab initio\}\$-guided X-ray photoelectron spectroscopy quantification of Ti vacancies in Ti\$\_\{1-δ\}\$O\$\_x\$N\$\_\{1-x\}\$ thin films},
  author = {Pavel Ondračka and Marcus Hans and Damian M. Holzapfel and Daniel Primetzhofer and David Holec and Jochen M. Schneider},
  year = {2021},
  url = {https://arxiv.org/abs/2110.03981},
  note = {Source identifier: 2110.03981}
}