TY - RPRT TI - Efficient single-emitter plasmonic patch antenna fabrication by novel deterministic in situ optical lithography using spatially modulated light AU - Amit Raj Dhawan AU - Michel Nasilowski AU - Zhiming Wang AU - Benoît Dubertret AU - Agnès Maître PY - 2021 UR - https://arxiv.org/abs/2110.07089 ID - 2110.07089 ER -