@misc{indiciae907c658b49f0,
  title = {A synchrotron-based kilowatt-level radiation source for EUV lithograph},
  author = {Bocheng Jiang and Chao Feng and Changliang Li and Zhenghe Bai and Weishi Wan and Dao Xiang and Qiang Gu and Kun Wang and Qinglei Zhang and Dazhang Huang and Senyu Chen},
  year = {2021},
  url = {https://arxiv.org/abs/2110.08987},
  note = {Source identifier: 2110.08987}
}