@misc{indiciae42588f15af4e,
  title = {Room-temperature silicon platform for GHz-frequency nano-electro-opto-mechanical systems},
  author = {D. Navarro-Urrios and M. F. Colombano and G. Arregui and G. Madiot and A. Pitanti and A. Griol and T. Makkonen and J. Ahopelto and C. M. Sotomayor-Torres and A. Martínez},
  year = {2021},
  url = {https://arxiv.org/abs/2110.09178},
  note = {Source identifier: 2110.09178}
}