@misc{indiciaed1769c3b6e77,
  title = {Monte Carlo simulation of the secondary electron yield of silicon rich silicon nitride},
  author = {A. M. M. G. Theulings and S. X. Tao and C. W. Hagen and H. Van der Graaf},
  year = {2021},
  doi = {10.1088/1748-0221/17/03/p03008},
  url = {https://arxiv.org/abs/2110.12965},
  note = {Source identifier: 2110.12965}
}