TY  - RPRT
TI  - Monte Carlo simulation of the secondary electron yield of silicon rich silicon nitride
AU  - A. M. M. G. Theulings
AU  - S. X. Tao
AU  - C. W. Hagen
AU  - H. Van der Graaf
PY  - 2021
DO  - 10.1088/1748-0221/17/03/p03008
UR  - https://arxiv.org/abs/2110.12965
ID  - 2110.12965
ER  -