@misc{indiciae85acc0b8321e,
  title = {Wet Scandium Etching for hard mask formation on a silicon substrate},
  author = {Julia Bondareva and Ekaterina Timofeeva and Alexandr Anikanov and Maxim Krasilnikov and Maxim Shibalov and Vasily Sen and Alexander Mumlyakov and Stanislav Evlashin and Mikhail Tarkhov},
  year = {2022},
  doi = {10.1016/j.tsf.2022.139543},
  url = {https://arxiv.org/abs/2110.13639},
  note = {Source identifier: 2110.13639}
}