@misc{indiciae79b68c839e13,
  title = {Spatially-Modulated Silicon Interface Energetics via Hydrogen Plasma-Assisted Atomic Layer Deposition of Ultrathin Alumina},
  author = {Alex Henning and Johannes D. Bartl and Lukas Wolz and Maximilian Christis and Felix Rauh and Michele Bissolo and Theresa Grünleitner and Johanna Eichhorn and Patrick Zeller and Matteo Amati and Luca Gregoratti and Jonathan J. Finley and Bernhard Rieger and Martin Stutzmann and Ian D. Sharp},
  year = {2022},
  doi = {10.48550/arxiv.2111.00054},
  url = {https://arxiv.org/abs/2111.00054},
  note = {Source identifier: 2111.00054}
}