@misc{indiciaeffc153cf22fd,
  title = {Formation of carbon interstitial-related defect levels by thermal injection of carbon into \$n\$-type 4\$H\$-SiC},
  author = {Robert Karsthof and Marianne Etzelmüller Bathen and Andrej Kuznetsov and Lasse Vines},
  year = {2021},
  doi = {10.1063/5.0077308},
  url = {https://arxiv.org/abs/2111.01011},
  note = {Source identifier: 2111.01011}
}