TY - RPRT TI - Formation of carbon interstitial-related defect levels by thermal injection of carbon into $n$-type 4$H$-SiC AU - Robert Karsthof AU - Marianne Etzelmüller Bathen AU - Andrej Kuznetsov AU - Lasse Vines PY - 2021 DO - 10.1063/5.0077308 UR - https://arxiv.org/abs/2111.01011 ID - 2111.01011 ER -