TY  - RPRT
TI  - A route to engineered high aspect-ratio silicon nanostructures through regenerative secondary mask lithography
AU  - Martyna Michalska
AU  - Sophia K. Laney
AU  - Tao Li
AU  - Manish K. Tiwari
AU  - Ivan P. Parkin
AU  - Ioannis Papakonstantinou
PY  - 2021
DO  - 10.1039/d1nr07024j
UR  - https://arxiv.org/abs/2111.01698
ID  - 2111.01698
ER  -