@misc{indiciae70b5ea402a7f, title = {Study of transport process and discharge structure of inductively coupled electronegative plasmas via fluid model and analytic theory collaboration}, author = {Shu-Xia Zhao and An-Qi Tang}, year = {2021}, url = {https://arxiv.org/abs/2111.01964}, note = {Source identifier: 2111.01964} }