TY  - RPRT
TI  - Study of transport process and discharge structure of inductively coupled electronegative plasmas via fluid model and analytic theory collaboration
AU  - Shu-Xia Zhao
AU  - An-Qi Tang
PY  - 2021
UR  - https://arxiv.org/abs/2111.01964
ID  - 2111.01964
ER  -