@misc{indiciae88f4e560e5c6,
  title = {Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits},
  author = {Aleksandr V. Tronev and Mikhail V. Parfenov and Sergey I. Bozhko and Andrey M. Ionov and Rais N. Mozhchil and Sergey V. Chekmazov and Petr M. Agruzov and Igor V. Ilichev and Aleksandr V. Shamrai},
  year = {2022},
  doi = {10.1364/ome.465690},
  url = {https://arxiv.org/abs/2111.02884},
  note = {Source identifier: 2111.02884}
}