TY  - RPRT
TI  - Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits
AU  - Aleksandr V. Tronev
AU  - Mikhail V. Parfenov
AU  - Sergey I. Bozhko
AU  - Andrey M. Ionov
AU  - Rais N. Mozhchil
AU  - Sergey V. Chekmazov
AU  - Petr M. Agruzov
AU  - Igor V. Ilichev
AU  - Aleksandr V. Shamrai
PY  - 2022
DO  - 10.1364/ome.465690
UR  - https://arxiv.org/abs/2111.02884
ID  - 2111.02884
ER  -