@misc{indiciaefb5f18003819,
  title = {Discharge structure of Ar/Cl2 inductively coupled plasma: A cyclic study of discharge conditions at fixed power},
  author = {Shu-Xia Zhao and An-Qi Tang},
  year = {2021},
  url = {https://arxiv.org/abs/2111.04223},
  note = {Source identifier: 2111.04223}
}