TY  - RPRT
TI  - Discharge structure of Ar/Cl2 inductively coupled plasma: A cyclic study of discharge conditions at fixed power
AU  - Shu-Xia Zhao
AU  - An-Qi Tang
PY  - 2021
UR  - https://arxiv.org/abs/2111.04223
ID  - 2111.04223
ER  -