@misc{indiciaefeb456c5ef7f,
  title = {Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties},
  author = {Ran Gao and Wenlong Yu and Hao Deng and Hsiang-Sheng Ku and Zhisheng Li and Minghua Wang and Xiaohe Miao and Yue Lin and Chunqing Deng},
  year = {2023},
  doi = {10.1103/physrevmaterials.6.036202},
  url = {https://arxiv.org/abs/2111.04227},
  note = {Source identifier: 2111.04227}
}