TY  - RPRT
TI  - Epitaxial titanium nitride microwave resonators: Structural, chemical, electrical, and microwave properties
AU  - Ran Gao
AU  - Wenlong Yu
AU  - Hao Deng
AU  - Hsiang-Sheng Ku
AU  - Zhisheng Li
AU  - Minghua Wang
AU  - Xiaohe Miao
AU  - Yue Lin
AU  - Chunqing Deng
PY  - 2023
DO  - 10.1103/physrevmaterials.6.036202
UR  - https://arxiv.org/abs/2111.04227
ID  - 2111.04227
ER  -