@misc{indiciae16100cfe021b,
  title = {Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing},
  author = {Toshiyuki Tabata and Fabien Rozé and Pablo Acosta Alba and Sébastien Halty and Pierre-Edouard Raynal and Imen Karmous and Sébastien Kerdilès and Fulvio Mazzamuto},
  year = {2021},
  url = {https://arxiv.org/abs/2111.07577},
  note = {Source identifier: 2111.07577}
}