@misc{indiciaef344eb17fb9b, title = {Design of a SOIMUMPs Inertial Sensor and readout Charge Amplifier}, author = {Hélder Campos and Nuno Paulino and João F. Loureiro}, year = {2021}, url = {https://arxiv.org/abs/2111.07880}, note = {Source identifier: 2111.07880} }