@misc{indiciae6b0a0e4718a9, title = {Exploring leakage in dielectric films via automated experiment in scanning probe microscopy}, author = {Yongtao Liu and Shelby S. Fields and Takanori Mimura and Kyle P. Kelley and Jon F. Ihlefeld and Sergei V. Kalinin}, year = {2021}, doi = {10.1063/5.0079217}, url = {https://arxiv.org/abs/2111.09918}, note = {Source identifier: 2111.09918} }