TY  - RPRT
TI  - Exploring leakage in dielectric films via automated experiment in scanning probe microscopy
AU  - Yongtao Liu
AU  - Shelby S. Fields
AU  - Takanori Mimura
AU  - Kyle P. Kelley
AU  - Jon F. Ihlefeld
AU  - Sergei V. Kalinin
PY  - 2021
DO  - 10.1063/5.0079217
UR  - https://arxiv.org/abs/2111.09918
ID  - 2111.09918
ER  -