@misc{indiciae723660302570,
  title = {High Power Vacuum Ultraviolet Source Based on Gasdynamic ECR Plasma},
  author = {R. L. Lapin and V. A. Skalyga and S. V. Golubev and I. V. Izotov and S. V. Razin},
  year = {2021},
  doi = {10.1063/5.0074388},
  url = {https://arxiv.org/abs/2111.11540},
  note = {Source identifier: 2111.11540}
}