TY  - RPRT
TI  - High Power Vacuum Ultraviolet Source Based on Gasdynamic ECR Plasma
AU  - R. L. Lapin
AU  - V. A. Skalyga
AU  - S. V. Golubev
AU  - I. V. Izotov
AU  - S. V. Razin
PY  - 2021
DO  - 10.1063/5.0074388
UR  - https://arxiv.org/abs/2111.11540
ID  - 2111.11540
ER  -