@misc{indiciaee49eaccbcd69,
  title = {Large-scale Fabrication of High-Density Silicon-vacancy Centers via Helium-ion Implantation of Diamond Nucleation Surface},
  author = {Chengyuan Yang and Zhaohong Mi and Huining Jin and Andrew Anthony Bettiol},
  year = {2021},
  url = {https://arxiv.org/abs/2111.11635},
  note = {Source identifier: 2111.11635}
}