@misc{indiciaefda4d8eb85c9, title = {Plasma asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms}, author = {Sarveshwar Sharma and Nishant Sirse and Animesh Kuley and Miles M Turner}, year = {2021}, doi = {10.1088/1361-6463/ac5da5}, url = {https://arxiv.org/abs/2111.11740}, note = {Source identifier: 2111.11740} }