TY  - RPRT
TI  - Plasma asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms
AU  - Sarveshwar Sharma
AU  - Nishant Sirse
AU  - Animesh Kuley
AU  - Miles M Turner
PY  - 2021
DO  - 10.1088/1361-6463/ac5da5
UR  - https://arxiv.org/abs/2111.11740
ID  - 2111.11740
ER  -