@misc{indiciae76b1a4d4794e,
  title = {Wafer-Scale Characterization of a Superconductor Integrated Circuit Fabrication Process, Using a Cryogenic Wafer Prober},
  author = {Joshua T. West and Arthur Kurlej and Alex Wynn and Chad Rogers and Mark A. Gouker and Sergey K. Tolpygo},
  year = {2021},
  doi = {10.1109/tasc.2022.3172660},
  url = {https://arxiv.org/abs/2112.00705},
  note = {Source identifier: 2112.00705}
}