TY  - RPRT
TI  - Wafer-Scale Characterization of a Superconductor Integrated Circuit Fabrication Process, Using a Cryogenic Wafer Prober
AU  - Joshua T. West
AU  - Arthur Kurlej
AU  - Alex Wynn
AU  - Chad Rogers
AU  - Mark A. Gouker
AU  - Sergey K. Tolpygo
PY  - 2021
DO  - 10.1109/tasc.2022.3172660
UR  - https://arxiv.org/abs/2112.00705
ID  - 2112.00705
ER  -