@misc{indiciae4288f8309bb4,
  title = {Sub-10 nm precision engineering of solid-state defects via nanoscale aperture array mask},
  author = {Tae-yeon Hwang and Junghyun Lee and Seong-Woo Jeon and Yong-Su Kim and Young-Wook Cho and Hyang-Tag Lim and Sung Moon and Sang-Wook Han and Yong-Ho Choa and Hojoong Jung},
  year = {2021},
  doi = {10.1021/acs.nanolett.1c04699},
  url = {https://arxiv.org/abs/2112.00943},
  note = {Source identifier: 2112.00943}
}