@misc{indiciae3923579cae6a,
  title = {Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation},
  author = {Gengyang Mu and Nikaya Snell and Chang Zhang and Xitong Xie and Radin Tahvildari and Arnaud Weck and Michel Godin and Raphael St-Gelais},
  year = {2021},
  url = {https://arxiv.org/abs/2112.09303},
  note = {Source identifier: 2112.09303}
}