@misc{indiciaef89eb9fa6dae,
  title = {Diffraction gratings based on multilayer silicon nitride waveguide with high upward efficiency and large effective length},
  author = {Wen-ling Li and Jing-wei Liu and Guo-an Cheng and Qing-zhong Huang and Rui-ting Zheng and Xiao-ling Wu},
  year = {2021},
  doi = {10.1364/ao.452651},
  url = {https://arxiv.org/abs/2112.11075},
  note = {Source identifier: 2112.11075}
}