TY  - RPRT
TI  - Diffraction gratings based on multilayer silicon nitride waveguide with high upward efficiency and large effective length
AU  - Wen-ling Li
AU  - Jing-wei Liu
AU  - Guo-an Cheng
AU  - Qing-zhong Huang
AU  - Rui-ting Zheng
AU  - Xiao-ling Wu
PY  - 2021
DO  - 10.1364/ao.452651
UR  - https://arxiv.org/abs/2112.11075
ID  - 2112.11075
ER  -