@misc{indiciae8591084e32ed,
  title = {Enchanced reflectance SiN\$\_x\$ / SiO\$\_x\$ DBR mirror based on TEOS precursor fabricated by PECVD method},
  author = {I. M. Asharchuk and M. V. Shibalov and A. M. Mumlyakov and P. A. Nekludova and G. D. Diudbin and E. V. Zenova and N. V. Minaev and A. A. Pavlov and M. A. Tarkhov},
  year = {2021},
  url = {https://arxiv.org/abs/2112.12525},
  note = {Source identifier: 2112.12525}
}