@misc{indiciae5ca028ae5880,
  title = {Continuum and Molecular Modeling of Chemical Vapor Deposition over Nano-scale Substrates},
  author = {Himel Barua and Alex Povitsky},
  year = {2021},
  doi = {10.3390/mca28060112},
  url = {https://arxiv.org/abs/2112.13154},
  note = {Source identifier: 2112.13154}
}