@misc{indiciaea84c79664af3,
  title = {Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure},
  author = {Chunjie Wang and Michael Friedrichs and Jens Oberrath and Ralf Peter Brinkmann},
  year = {2022},
  doi = {10.1088/1361-6595/ac915a},
  url = {https://arxiv.org/abs/2112.14190},
  note = {Source identifier: 2112.14190}
}