@misc{indiciae96f0af695f53, title = {Coulomb actuated microbeams: A Chebyshev-Edgeworth approach to highly efficient lumped parameter models}, author = {Hermann A. G. Schenk and Anton Melnikov and Franziska Wall and Matthieu Gaudet and Michael Stolz and David Schuffenhauer and Bert Kaiser}, year = {2022}, url = {https://arxiv.org/abs/2201.01627}, note = {Source identifier: 2201.01627} }