@misc{indiciae8c6141e51d67,
  title = {Scalable CMOS-BEOL compatible AlScN/2D Channel FE-FETs},
  author = {Kwan-Ho Kim and Seyong Oh and Merrilyn Mercy Adzo Fiagbenu and Jeffrey Zheng and Pariasadat Musavigharavi and Pawan Kumar and Nicholas Trainor and Areej Aljarb and Yi Wan and Hyong Min Kim and Keshava Katti and Zichen Tang and Vincent C. Tung and Joan Redwing and Eric A. Stach and Roy H. Olsson III and Deep Jariwala},
  year = {2022},
  url = {https://arxiv.org/abs/2201.02153},
  note = {Source identifier: 2201.02153}
}