@misc{indiciaeb86afa9c0a35, title = {An atom passing through a hole in a dielectric membrane: Impact of dispersion forces on mask-based matter-wave lithography}, author = {Johannes Fiedler and Bodil Holst}, year = {2022}, doi = {10.1088/1361-6455/ac4b41}, url = {https://arxiv.org/abs/2201.03845}, note = {Source identifier: 2201.03845} }