@misc{indiciaec1eb164cc3b5,
  title = {Scalable production of single 2D van der Waals layers through atomic layer deposition: Bilayer silica on metal foils and films},
  author = {Gregory S. Hutchings and Xin Shen and Chao Zhou and Petr Dementyev and Daniil Naberezhnyi and Inga Ennen and Andreas Hütten and Nassar Doudin and Jesse Hsu and Zachary S. Fishman and Udo D. Schwarz and Shu Hu and Eric I. Altman},
  year = {2022},
  url = {https://arxiv.org/abs/2201.04483},
  note = {Source identifier: 2201.04483}
}