@misc{indiciae7724b7f4e721,
  title = {Machine Learning-enhanced Efficient Spectroscopic Ellipsometry Modeling},
  author = {Ayush Arunachalam and S. Novia Berriel and Parag Banerjee and Kanad Basu},
  year = {2022},
  url = {https://arxiv.org/abs/2201.04933},
  note = {Source identifier: 2201.04933}
}