TY  - RPRT
TI  - Machine Learning-enhanced Efficient Spectroscopic Ellipsometry Modeling
AU  - Ayush Arunachalam
AU  - S. Novia Berriel
AU  - Parag Banerjee
AU  - Kanad Basu
PY  - 2022
UR  - https://arxiv.org/abs/2201.04933
ID  - 2201.04933
ER  -