TY  - RPRT
TI  - Development of hard masks for reactive ion beam angled etching of diamond
AU  - Cleaven Chia
AU  - Bartholomeus Machielse
AU  - Amirhassan Shams-Ansari
AU  - Marko Loncar
PY  - 2022
DO  - 10.1364/oe.452826
UR  - https://arxiv.org/abs/2201.06416
ID  - 2201.06416
ER  -