@misc{indiciaea749e0ad258a,
  title = {Proposal of Plane-Parallel Resonator Configuration for High-NA EUV Lithography},
  author = {Tsumoru Shintake},
  year = {2022},
  url = {https://arxiv.org/abs/2201.06749},
  note = {Source identifier: 2201.06749}
}