TY  - RPRT
TI  - Keeping Deep Lithography Simulators Updated: Global-Local Shape-Based Novelty Detection and Active Learning
AU  - Hao-Chiang Shao
AU  - Hsing-Lei Ping
AU  - Kuo-shiuan Chen
AU  - Weng-Tai Su
AU  - Chia-Wen Lin
AU  - Shao-Yun Fang
AU  - Pin-Yian Tsai
AU  - Yan-Hsiu Liu
PY  - 2022
UR  - https://arxiv.org/abs/2201.09717
ID  - 2201.09717
ER  -