@misc{indiciae63dd7b78241d,
  title = {Qubit-compatible substrates with superconducting through-silicon vias},
  author = {K. Grigoras and N. Yurttagül and J. -P. Kaikkonen and E. T. Mannila and P. Eskelinen and D. P. Lozano and H. -X. Li and M. Rommel and D. Shiri and N. Tiencken and S. Simbierowicz and A. Ronzani and J. Hätinen and D. Datta and V. Vesterinen and L. Grönberg and J. Biznárová and A. Fadavi Roudsari and S. Kosen and A. Osman and M. Prunnila and J. Hassel and J. Bylander and J. Govenius},
  year = {2022},
  doi = {10.1109/tqe.2022.3209881},
  url = {https://arxiv.org/abs/2201.10425},
  note = {Source identifier: 2201.10425}
}